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Photolithography
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Machine Name
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Location
|
Contact window
|
Remark
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Spin Coater (Multi Setps / 2 Steps)
|
Complex for Research Excellence
Yellow Room
|
Gou-Sheng Lyu
|
|
|
Aligner (MA8/BA8)
|
Complex for Research Excellence
Yellow Room
|
Gou-Sheng Lyu
|
|
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Aligner (MA6/BA6)
|
Complex for Research Excellence
Yellow Room
|
Gou-Sheng Lyu
|
|
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Laser lithography (DWL2000)
|
Complex for Research Excellence
Yellow Room
|
Gou-Sheng Lyu
|
Unavailable for all users
|
| Digital Hot Plate |
Complex for Research Excellence
Yellow Room
|
Shih-Chun Huang |
|
| Oven |
Complex for Research Excellence
Yellow Room
|
Shih-Chun Huang |
|
|
Dry Etching
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Machine Name
|
Location
|
Contact window
|
Remark
|
|
ICP-RIE (Si DRIE)
|
Complex for Research Excellence
Dry Etch Room
|
Yu-Ta Chen
|
|
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ICP-RIE (Multi Material Etcher)
|
Complex for Research Excellence
Dry Etch Room
|
Yu-Ta Chen
|
|
|
RIE Descum
|
Complex for Research Excellence
Dry Etch Room
|
Yu-Ta Chen
|
|
|
O2 Plasma
|
Complex for Research Excellence
Dry Etch Room
|
Yu-Ta Chen
|
|
|
Thin Film Deposition
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|
Machine Name
|
Location
|
Contact window
|
Remark
|
|
LPCVD
|
Complex for Research Excellence
CVD Room
|
Yu-Ta Chen
|
|
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APCVD
|
Complex for Research Excellence
CVD Room
|
Yu-Ta Chen
|
|
|
PECVD
|
Complex for Research Excellence
CVD Room
|
Yu-Ta Chen
|
|
|
E-beam Evaporator (Metal)
|
Complex for Research Excellence
PVD Room
|
Shih-Chun Huang
|
Crucible size
Upper diameter 3.7 cm
Lower diameter 2.8 cm
Height 1.75 cm
Wall thickness 0.35 cm
Bottom thickness 1 cm
|
|
E-beam Evaporator (Oxside)
|
Complex for Research Excellence
PVD Room
|
Shih-Chun Huang
|
|
Sputter
|
Complex for Research Excellence
PVD Room
|
Shih-Chun Huang
|
4" target
|
|
Measurement & Analysis
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|
Machine Name
|
Location
|
Contact window
|
Remark
|
|
SEM
|
Complex for Research Excellence
Analysis Room
|
Shih-Chun Huang
|
|
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EDS
|
Complex for Research Excellence
Analysis Room
|
Shih-Chun Huang
|
|
|
Sputter Coater
|
Complex for Research Excellence
Analysis Room
|
Shih-Chun Huang
|
|
|
Surface Profiler
|
Complex for Research Excellence
Analysis Room
|
Shih-Chun Huang
|
|
|
Laser Confocal Microscope
|
Complex for Research Excellence
Analysis Room
|
Shih-Chun Huang
|
|
|
Ellipseometer
|
Complex for Research Excellence
Analysis Room
|
Shih-Chun Huang
|
|
| Semiconductor Analyzer |
Complex for Research Excellence
Analysis Room
|
Shih-Chun Huang
|
|
| Film Thickness Reflectometer |
Complex for Research Excellence
Analysis Room
|
Gou-Sheng Lyu |
|
| Optical Microscope |
Complex for Research Excellence
Yellow Room
|
Shih-Chun Huang |
|
|
Other Processes
|
|
Machine Name
|
Location
|
Contact window
|
Remark
|
| Rapid Thermal Anneaing |
Complex for Research Excellence
Dry Etch Room
|
Shih-Chun Huang |
|
| Ultrasonic Cleaners |
Complex for Research Excellence
Yellow Room
|
Gou-Sheng Lyu
|
|
| Chemical Hood |
Complex for Research Excellence
Yellow Room
Wet Etch Room
|
Gou-Sheng Lyu
|
|
| Wafer Bonder |
Complex for Research Excellence
Yellow Room
|
Gou-Sheng Lyu
|
Unavailable for all users
|