| Item |
Academic Units |
Profit-making Organizations |
Remark |
| Cleanroom |
NT$ 3/min |
NT$ 6/min |
|
| Measurement |
| Box Furnace |
NT$ 5/min |
NT$ 10/min |
|
| New Dicing Saw |
With 30 minutes: NT$ 520;
Over 30 minutes: NT$ 520+NT$ 15/min
|
With 30 minutes: NT$ 1040;
Over 30 minutes: NT$ 1040+NT$ 30/min
|
Less than 30 minutes will be counted as 30 minutes |
| Optics-Type Surface Analyser |
NT$ 12/min |
NT$ 24/min |
|
| Probe-Type Surface Analyser |
NT$ 12/min |
NT$ 24/min |
|
| Optical Microscope |
NT$ 1/min |
NT$ 2/min |
|
| Photolithography |
| Laurell Multi Steps / 2 Steps Spin Coater |
NT$ 100+ NT$ 6/min
(Start-up fee: NT$ 100) |
NT$ 200+ NT$ 12/min
(Start-up fee: NT$ 200) |
|
| EVG Aligner |
NT$ 600+ NT$ 18/min
(Start-up fee: NT$ 600) |
NT$ 1,200+ NT$ 36/min
(Start-up fee: NT$ 1,200) |
Resolution 1um |
| Karl Suss Aligner |
NT$ 600+ NT$ 18/min
(Start-up fee: NT$ 600) |
NT$ 1,200+ NT$ 36/min
(Start-up fee: NT$ 1,200) |
Resolution 2um |
| Etching |
| O2 Plasma |
NT$ 3/min |
NT$ 6/min |
|
| CVD |
| E-beam Evaporator |
Electron-Beam turn on within 30 minutes: NT$ 1,040;
Over 30 minutes: NT$ 1,040+ NT$ 12/ min
|
Within 30 minutes: NT$ 2,080;
Over 30 minutes: NT$ 2,080+ NT$ 24/ min
|
Less than 30 minutes will be counted as 30 minutes |
| New Sputter |
Electron-Beam turn on within 30 minutes: NT$ 520;
Over 30 minutes: NT$ 520+ NT$ 15/ min
|
Within 30 minutes: NT$ 1,040;
Over 30 minutes: NT$ 1,040+ NT$ 30/ min
|
Less than 30 minutes will be counted as 30 minutes |
| Parylene Deposition System |
Within 90 minutes: NT$ 1,000;
Over 90 minutes: NT$ 1,000+ NT$ 4/ min
|
Within 90 minutes: NT$ 2,000;
Over 90 minutes: NT$ 2,000+ NT$ 8/ min
|
Less than 90 minutes will be counted as 90 minutes |
| RIE |
NT$ 750+ NT$ 30/min
(Start-up fee: NT$ 750)
|
NT$ 1,500+ NT$ 60/min
(Start-up fee: NT$ 1,500)
|
Gas price: 1sccm is about NT$ 0.01 |
| Others |
| Sand-blaster |
NT$ 150/30min |
NT$ 300/30min |
|