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Photolithography
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Machine Name
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Location
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Contact window
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Remark
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Spin Coater (Multi Steps / 2 Steps)
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Institute of Applied Mechanics
Yello Room
|
Gou-Sheng Lyu
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Aligner (EVG)
|
Institute of Applied Mechanics
Yello Room
|
Gou-Sheng Lyu
|
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Aligner (MA6)
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Institute of Applied Mechanics
Yello Room
|
Gou-Sheng Lyu
|
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Digital Hot Plate
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Institute of Applied Mechanics
Yello Room
|
Shih-Chun Huang |
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Oven
|
Institute of Applied Mechanics
Yello Room
|
Shih-Chun Huang |
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Dry Etching
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Machine Name
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Location
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Contact window
|
Remark
|
| Air Plasma |
Institute of Applied Mechanics
Thin Film Room
|
Yu-Ta Chen
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Thin Film Deposition
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Machine Name
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Location
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Contact window
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Remark
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Sputter
|
Institute of Applied Mechanics
Thin Film Room
|
Shih-Chun Huang
|
(Oxygen and oxides, zinc and zinc compounds and magnetic substances are prohibited)
2" target
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Parylene Deposition System
|
Institute of Applied Mechanics
Thin Film Room
|
Shih-Chun Huang
|
|
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E-beam Evaporator
|
Institute of Applied Mechanics
Thin Film Room
|
Shih-Chun Huang
|
Crucible size
Upper diameter 21 mm
Lower diameter 17 mm
Height 1 cm
Wall thickness 1 mm
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Measurement & Analysis
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Machine Name
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Location
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Contact window
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Remark
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|
Probe-Type Surface Analyser
|
Institute of Applied Mechanics
Measurement Room
|
Shih-Chun Huang
|
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Optical Microscope
|
Institute of Applied Mechanics
Measurement Room
Yellow Room
|
Shih-Chun Huang
|
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Other Processes
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|
Machine Name
|
Location
|
Contact window
|
Remark
|
|
Box Furnace
|
Institute of Applied Mechanics
Measurement Room
|
Shih-Chun Huang
|
|
| Sand-blaster |
Institute of Applied Mechanics
Facility Room B1
|
Shih-Chun Huang
|
|
| Dicing Saw |
Institute of Applied Mechanics
Measurement Room
|
Shih-Chun Huang
|
|
| Chemical Hood |
Institute of Applied Mechanics
Wet Etch Room
Yellow Room
|
Shih-Chun Huang
|
|
| Ultrasonic Cleaners |
Institute of Applied Mechanics
Yellow Room
|
Shih-Chun Huang
|
|