| Item |
Academic Units |
Profit-making Organizations |
Remark |
| Cleanroom |
NT$ 3/min |
NT$ 6/min |
|
| Chemical Usage |
NT$ 600/4L |
NT$ 1,200/4L |
Acetone |
| Space Usage |
NT$ 2,400/year |
NTD 2,400/year |
Large locker |
| Space Usage |
NT$ 1,200/year |
NT$ 1,200/year |
Small locker |
| Space Usage |
NT$ 3,000/year |
NT$ 3,000/year |
Large iron cabinet |
| Space Usage |
NT$ 2,000/year |
NT$ 2,000/year |
Small iron cabinet |
| Photolithography |
| Multi Steps / 2 Steps Spin Coater |
NT$ 3/min |
NT$ 6/min |
|
| SUSS MA8/BA8 |
NT$ 420 (No charge for the first 30 minutes)+ NT$ 11/min
(Start-up fee: NT$ 420)
|
NT$ 840 + NT$ 22/min
(Start-up fee: NT$ 840) |
|
| SUSS MA6/BA6 |
NT$ 350 (No charge for the first 30 minutes)+ NT$ 9/min
(Start-up fee: NT$ 350) |
NT$ 700 (No charge for the first 30 minutes)+ NT$ 18/min
(Start-up fee: NT$ 700) |
|
| Wafer bonder |
With 60 minutes: NT$ 510;
Over 60 minutes: NT$ 510+NT$ 6/min
|
With 60 minutes: NT$ 1,020;
Over 60 minutes: NT$ 1,020+NT$ 12/min
|
|
| Laser lithography-DWL2000 |
NT$ 8,400 for 6 inches
NT$ 6,000 for 5 inches
NT$ 5,400 for 4 inches
NT$600(Drawing review fee/hr) |
NT$ 16,800 for 6 inches
NT$ 12,000 for 5 inches
NT$ 10,800 for 4 inches
NT$1,200(Drawing review fee/hr)
|
Special use:
Academic unit: NT$ 250/min; Profit-making Organizations: NT$ 500/min
|
| CVD |
| APCVD |
NT$ 1,000 + NT$ 18-20/min
(Start-up fee: NT$ 1,000; according to material)
|
NT$ 2,000 + NT$ 36-40/min
(Start-up fee: NT$ 2,000; according to material)
|
Unavailable for all users |
|
LPCVD
|
NT$ 1,000 + NT$ 18-36/min
(Start-up fee: NT$ 1,000; according to material)
|
NT$ 1,000 + NT$ 36-72/min
(Start-up fee: NT$ 2,000; according to material) |
Unavailable for all users |
| PECVD |
NT$ 600 + NT$ 30/min
(Start-up fee: NT$ 600)
|
NT$ 1,200 + NT$ 60/min
(Start-up fee: NT$ 1,200) |
|
| Etching |
| Samco ICP |
NT$ 240 (No charge for the first 5 minutes)+ NT$ 72/min
(Start-up fee: NT$ 240)
|
NT$ 480 (No charge for the first 5 minutes)+ NT$ 144/min
(Start-up fee: NT$ 480) |
|
| Oxford ICP-RIE |
NT$ 240 (No charge for the first 5 minutes)+ NT$ 72/min
(Start-up fee: NT$ 240)
|
NT$ 480 (No charge for the first 5 minutes)+ NT$ 144/min
(Start-up fee: NT$ 480) |
|
| RIE Descum |
NT$ 200 + NT$ 30/min
(Start-up fee: NT$ 200) |
NT$ 400 + NT$ 60/min
(Start-up fee: NT$ 400) |
|
| O2 Descum |
NT$ 240 + NT$ 36/min
(Start-up fee: NT$ 240) |
NT$ 480 + NT$ 72/min
(Start-up fee: NT$ 480) |
|
| Rapid Thermal Anneaing |
With 120 minutes: NT$ 900;
Over 120 minutes: NT$ 900+NT$ 6/min
|
With 120 minutes: NT$ 1800;
Over 120 minutes: NT$ 1800+NT$ 12/min
|
|
| Thin Film |
| E-Beam Evaporator (Metal) |
Electron-Beam turn on within 30 minutes: NT$ 520;
Over 30 minutes: NT$ 520+ NT$ 6/ min
|
Electron-Beam turn on within 30 minutes: NT$ 1,040;
Over 30 minutes: NT$ 1,040+ NT$ 12/ min
|
|
| E-Beam Evaporator (Oxide) |
Electron-Beam turn on within 30 minutes: NT$ 520;
Over 30 minutes: NT$ 520+ NT$ 6/ min
|
Electron-Beam turn on within 30 minutes: NT$ 1,040;
Over 30 minutes: NT$ 1,040+ NT$ 12/ min
|
|
| Sputter |
Plamsa turn on within 30 minutes: NT$ 520;
Over 30 minutes: NT$ 520+ NT$ 15/ min
|
Plamsa turn on within 30 minutes: NT$ 1,040;
Over 30 minutes: NT$ 1,040+ NT$ 30/ min
|
|
| Analysis |
| SEM |
With 60 minutes: NT$ 720;
Over 60 minutes: NT$720+NT$ 360/30min
|
With 60 minutes: NT$ 1,440;
Over 60 minutes: NT$1,440+NT$ 720/30min
|
Less than 30 minutes will be counted as 30 minutes |
| EDS |
NT$ 240/30min |
NT$ 480/30min |
Less than 30 minutes will be counted as 30 minutes |
| Sputter Coater |
NT$ 300/30min |
NT$ 600/30min |
Less than 30 minutes will be counted as 30 minutes |
| Surface Profiler |
NT$ 7/min |
NT$ 14/min |
|
| Laser confocal microscope |
NT$ 7/min |
NT$ 14/min |
|
| Ellipsometer |
NT$ 7/min |
NT$ 14/min |
|
| Semiconductor Analyzer |
NT$ 7/min |
NT$ 14/min |
|