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Cleanroom of Complex for Research Excellence
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Cleanroom of Institute of Applied Mechanics
Cleanroom of Complex for Research Excellence
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Semiconductor Analyzer OEM
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Regulations for the Establishment of NEMS
Regulations of Scientific Paper Competition
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封裝製程
Photolithography
Aligner (MA8/BA8) - CRE
SUSS MA6/BA6-卓越大樓
Laser lithography DWL 2000 雷射直寫儀-卓越大樓
Wafer bonder-卓越大樓
Spin Coater-卓越大樓
Spin Coater-應力所
Chemical Hood-應力所
EVG Aligner-應力所
Karl Suss Aligner MA6-應力所
Oven-應力所
分析室
Dicing Saw-應力所
Optical Microscope(光學顯微鏡)-應力所
Optical-type surface analyser (干射暨雷射共軛焦表面分析儀)-應力所
Probe-Type Surface Analyser探針式表面分析儀-應力所
Box Furnace 高溫爐-應力所
Wire Bonder 打線機-應力所
量測區
3D Laser Scanning Microscope-卓越大樓
EDS(能量色散光譜儀)-卓越大樓
Ellipseometer(橢圓偏振儀)-卓越大樓
SEM(掃描式電子顯微鏡)-卓越大樓
Sputter Coater (SEM 鍍金機)-卓越大樓
Surface Profile (表面輪廓儀) - 卓越大樓
Semiconductor Analyzer (半導體參數分析儀) - 卓越大樓
蝕刻室
Chemical Hood-應力所
Digital Hot Plate-應力所
O2 Plasma(氧電漿清洗機)-應力所
Ultrasonic Cleaners-應力所
RTA(快速熱退火儀)-卓越大樓
ICP-RIE(Oxford)多材料蝕刻-電感耦合電漿蝕刻機-卓越大樓
ICP-RIE(Samco)矽蝕刻-電感耦合電漿蝕刻機-卓越大樓
O2 Plasma(氧電漿清洗機)-卓越大樓
RIE(反應離子蝕刻機)-卓越大樓
薄膜區
E-Gun Metal電子束蒸鍍機(金屬)-卓越大樓
Sputter(濺鍍機)-卓越大樓
爐管室
E-beam Evaporator(電子束蒸鍍機)-應力所
Helium Leak Detector-應力所
Parylene Deposition System(聚對二甲基苯沉積系統)-應力所
PECVD(電漿輔助化學氣相沉積系統)-應力所
RIE(反應離子蝕刻機)-應力所
Sputter(射頻濺鍍機)-應力所
APCVD 常壓化學氣相沉積系統-卓越大樓
LPCVD 低壓化學氣相沉積系統-卓越大樓
PECVD 電漿輔助化學氣相沉積系統 -卓越大樓
應力所B1
Sand-blaster -噴砂機